JPS62193726U - - Google Patents
Info
- Publication number
- JPS62193726U JPS62193726U JP8096886U JP8096886U JPS62193726U JP S62193726 U JPS62193726 U JP S62193726U JP 8096886 U JP8096886 U JP 8096886U JP 8096886 U JP8096886 U JP 8096886U JP S62193726 U JPS62193726 U JP S62193726U
- Authority
- JP
- Japan
- Prior art keywords
- mercury
- oxide film
- silicon oxide
- semiconductor device
- deposited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 5
- 229910052753 mercury Inorganic materials 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 238000006552 photochemical reaction Methods 0.000 claims 1
- 208000017983 photosensitivity disease Diseases 0.000 claims 1
- 231100000434 photosensitization Toxicity 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8096886U JPS62193726U (en]) | 1986-05-30 | 1986-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8096886U JPS62193726U (en]) | 1986-05-30 | 1986-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62193726U true JPS62193726U (en]) | 1987-12-09 |
Family
ID=30932268
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8096886U Pending JPS62193726U (en]) | 1986-05-30 | 1986-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62193726U (en]) |
-
1986
- 1986-05-30 JP JP8096886U patent/JPS62193726U/ja active Pending
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